The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 03, 2017
Filed:
Oct. 30, 2012
Applicant:
Tokyo Ohka Kogyo Co., Ltd., Kawasaki-shi, JP;
Inventors:
Assignee:
TOKYO OHKA KOGYO CO., LTD., Kawasaki-Shi, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C09K 13/06 (2006.01); C09K 13/08 (2006.01); G03F 7/42 (2006.01);
U.S. Cl.
CPC ...
G03F 7/425 (2013.01); G03F 7/423 (2013.01);
Abstract
A stripping solution for photolithography including hydrofluoric acid, a basic compound represented by general formula (b-1), and water. In the formula, Rto Rrepresent a hydrogen atom, an alkyl group having 1 to 6 carbon atoms or the like, and at least one of Rto Rrepresents a hydrogen atom. One of Rto Rmay bind with Rto form a ring structure. Yand Yrepresent an alkylene group having 1 to 3 carbon atoms, and n is an integer of 0 to 5.