The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 03, 2017
Filed:
Jul. 25, 2013
Applicant:
Japan Electronic Materials Corporation, Amagasaki-shi, Hyogo, JP;
Inventors:
Teppei Kimura, Amagasaki, JP;
Liwen Fan, Amagasaki, JP;
Assignee:
Japan Electronic Materials Corporation, Amagasaki-shi, Hyogo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01R 3/00 (2006.01); G01R 1/073 (2006.01); G01R 1/18 (2006.01); C25D 5/02 (2006.01); C25D 5/48 (2006.01); G01R 31/28 (2006.01);
U.S. Cl.
CPC ...
G01R 1/07371 (2013.01); C25D 5/02 (2013.01); C25D 5/48 (2013.01); G01R 1/18 (2013.01); G01R 31/2889 (2013.01); G01R 3/00 (2013.01);
Abstract
It is an object of the invention to provide a guide plate for a probe card with fine through holes at tight pitches and with increased strength. The guide platefor a probe card includes a metal base; first insulation layers; and metal layers. The metal basehas a plurality of through holesto receive probes therethrough, and inner walls of the through holes. The first insulation layersare of tuboid shape and provided on the respective inner walls of the through holesof the metal base. The metal layersare provided on the first insulation layers