The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 27, 2016
Filed:
Jun. 09, 2015
Fei Company, Hillsboro, OR (US);
Sean Kellogg, Portland, OR (US);
Anthony Graupera, Hillsboro, OR (US);
William N. Parker, Hillsboro, OR (US);
Andrew B. Wells, Portland, OR (US);
Mark W. Utlaut, Scappoose, OR (US);
Walter Skoczylas, Aloha, OR (US);
Gregory A. Schwind, Portland, OR (US);
Noel Smith, Lake Oswego, OR (US);
Shouyin Zhang, Portland, OR (US);
FEI COMPANY, Hillsboro, OR (US);
Abstract
An inductively coupled plasma charged particle source for focused ion beam systems includes a plasma reaction chamber with a removably attached source electrode. A fastening mechanism connects the source electrode with the plasma reaction chamber and allows for a heat-conductive, vacuum seal to form. With a removable source electrode, improved serviceability and reuse of the plasma source tube are now possible.