The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 27, 2016
Filed:
Oct. 04, 2006
Applicants:
David Adler, San Jose, CA (US);
Kirk Bertsche, San Jose, CA (US);
Mark Mccord, Mountain View, CA (US);
Stuart Friedman, Palo Alto, CA (US);
Inventors:
David Adler, San Jose, CA (US);
Kirk Bertsche, San Jose, CA (US);
Mark McCord, Mountain View, CA (US);
Stuart Friedman, Palo Alto, CA (US);
Assignee:
KLA-Tencor Corporation, Milpitas, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G06K 9/00 (2006.01); G03F 7/20 (2006.01); G01N 21/956 (2006.01); G01N 23/20 (2006.01); G01N 23/225 (2006.01); G03F 1/84 (2012.01); G03F 1/86 (2012.01); H01J 37/28 (2006.01);
U.S. Cl.
CPC ...
G03F 7/7065 (2013.01); G01N 21/956 (2013.01); G01N 21/95607 (2013.01); G01N 23/20 (2013.01); G01N 23/2252 (2013.01); G03F 1/84 (2013.01); G03F 1/86 (2013.01); G03F 7/70616 (2013.01); H01J 37/28 (2013.01); H01J 2237/2817 (2013.01);
Abstract
A method and apparatus for inspection and review of defects is disclosed wherein data gathering is improved. In one embodiment, multiple or segmented detectors are used in a particle beam system.