The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 27, 2016
Filed:
Sep. 26, 2012
Applicants:
Hiroaki Mizuno, Kiyosu, JP;
Junya Kitamura, Kiyosu, JP;
Yoshiyuki Kobayashi, Miyagi-ken, JP;
Inventors:
Assignees:
FUJIMI INCORPORATED, Kiyosu-Shi, JP;
TOKYO ELECTRON LIMITED, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 4/10 (2016.01); C23C 4/04 (2006.01); C23C 4/06 (2016.01); C23C 4/08 (2016.01);
U.S. Cl.
CPC ...
C23C 4/105 (2013.01); C23C 4/04 (2013.01); C23C 4/06 (2013.01); C23C 4/08 (2013.01); C23C 4/11 (2016.01);
Abstract
A thermal spray powder of the present invention contains a rare earth element and a diluent element that is not a rare earth element or oxygen, which is at least one element selected, for example, from zinc, silicon, boron, phosphorus, titanium, calcium, strontium, and magnesium. A sintered body of a single oxide of the diluent element has an erosion rate under specific etching conditions that is no less than 5 times the erosion rate of an yttrium oxide sintered body under the same etching conditions.