The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 27, 2016

Filed:

Sep. 29, 2015
Applicant:

Fujifilm Corporation, Tokyo, JP;

Inventors:

Natsumi Yokokawa, Shizuoka, JP;

Hiroo Takizawa, Shizuoka, JP;

Shuji Hirano, Shizuoka, JP;

Wataru Nihashi, Shizuoka, JP;

Hideaki Tsubaki, Shizuoka, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/004 (2006.01); C07C 381/12 (2006.01); H01L 21/027 (2006.01); G03F 7/039 (2006.01); G03F 7/20 (2006.01); G03F 7/32 (2006.01); C07D 309/12 (2006.01); C07D 317/22 (2006.01); G03F 7/038 (2006.01);
U.S. Cl.
CPC ...
C07C 381/12 (2013.01); C07D 309/12 (2013.01); C07D 317/22 (2013.01); G03F 7/0045 (2013.01); G03F 7/0046 (2013.01); G03F 7/038 (2013.01); G03F 7/039 (2013.01); G03F 7/0392 (2013.01); G03F 7/0397 (2013.01); G03F 7/20 (2013.01); G03F 7/2004 (2013.01); G03F 7/2041 (2013.01); G03F 7/2059 (2013.01); G03F 7/325 (2013.01); H01L 21/0275 (2013.01);
Abstract

There is provided an actinic ray-sensitive or radiation-sensitive resin composition containing a compound represented by the following formula (1) or (2), and the formula (1) and (2) are defined as herein, and a resist film comprising the actinic ray-sensitive or radiation-sensitive resin composition, and a pattern forming method comprising a step of exposing the resist film, and a step of developing the exposed film, and a method for manufacturing an electronic device, comprising the pattern forming method, and an electronic device manufactured by the manufacturing method of an electronic device.


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