The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 20, 2016
Filed:
Oct. 21, 2014
Applicant:
Sandisk Technologies Inc., Plano, TX (US);
Inventors:
Hiroto Ohori, Yokkaichi, JP;
Takuya Futase, Yokkaichi, JP;
Yuji Takahashi, Yokkaichi, JP;
Toshiyuki Sega, Yokkaichi, JP;
Kiyokazu Shishido, Yokkaichi, JP;
Kotaro Jinnouchi, Yokkaichi, JP;
Noritaka Fukuo, Yokkaichi, JP;
Assignee:
SanDisk Technologies LLC, Plano, TX (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/768 (2006.01); H01L 23/48 (2006.01);
U.S. Cl.
CPC ...
H01L 21/76843 (2013.01); H01L 21/7682 (2013.01); H01L 21/76802 (2013.01); H01L 21/76877 (2013.01);
Abstract
Dummy bit lines of are formed in a sacrificial layer at locations where bit lines are to be formed, with bit lines separated by trenches that extend through the sacrificial layer. Enclosed air gap structures are formed in the trenches between the dummy bit lines. Subsequently, the dummy bit lines are replaced with metal to form bit lines.