The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 20, 2016

Filed:

Mar. 10, 2014
Applicants:

Shinko Electric Industries Co., Ltd., Nagano-shi, Nagano, JP;

Japan Electronic Materials Corporation, Amagasaki-shi, Hyogo, JP;

Inventors:

Akinori Shiraishi, Nagano, JP;

Kosuke Fujihara, Nagano, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01R 1/073 (2006.01);
U.S. Cl.
CPC ...
G01R 1/07357 (2013.01); G01R 1/07371 (2013.01);
Abstract

There is provided a probe guide plate. The probe guide plate includes: a substrate having a through hole for guiding a probe, which is formed through the substrate, wherein the substrate includes a first main surface and a second main surface opposite to the first main surface; and a first insulating film formed on an inner wall of the through hole and on the first and second main surfaces of the substrate such that portions of the first and second main surfaces of the substrate are exposed.


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