The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 06, 2016
Filed:
Jul. 17, 2015
Applicant:
Fei Company, Hillsboro, OR (US);
Inventor:
David Foord, Portland, OR (US);
Assignee:
FEI COMPANY, Hillsboro, OR (US);
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/00 (2006.01); H01J 37/22 (2006.01); H01J 37/26 (2006.01); H01J 37/20 (2006.01); H01J 37/244 (2006.01);
U.S. Cl.
CPC ...
H01J 37/22 (2013.01); H01J 37/20 (2013.01); H01J 37/244 (2013.01); H01J 37/26 (2013.01); H01J 2237/20207 (2013.01); H01J 2237/20214 (2013.01); H01J 2237/226 (2013.01);
Abstract
A system and method for transmission electron microscopy is provided. The sample can be examined from multiple directions using an electron beam in a transmission electron microscope. The sample has at least three observation faces that are not parallel to each other with the thickness of the sample orthogonal to each of the observation faces being less than 200 nm. The sample is mounted on a needle that is needle rotatable about more than one axis so the needle can orient at least three of the observation faces to be normal to the electron beam of the electron microscope for observation.