The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 06, 2016
Filed:
Oct. 20, 2015
Applicant:
Tokyo Electron Limited, Tokyo, JP;
Inventors:
Akira Shimizu, Nirasaki, JP;
Masayuki Kitamura, Nirasaki, JP;
Assignee:
Tokyo Electron Limited, Tokyo, JP;
Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C30B 25/18 (2006.01); H01L 21/02 (2006.01); C30B 25/16 (2006.01); C23C 16/52 (2006.01); H01L 21/285 (2006.01);
U.S. Cl.
CPC ...
C30B 25/18 (2013.01); C23C 16/52 (2013.01); C30B 25/165 (2013.01); H01L 21/02115 (2013.01); H01L 21/02164 (2013.01); H01L 21/02211 (2013.01); H01L 21/02271 (2013.01); H01L 21/02304 (2013.01); H01L 21/02312 (2013.01); H01L 21/28568 (2013.01);
Abstract
There is provided a selective growth method of selectively growing a thin film on exposed surfaces of an underlying insulation film and an underlying metal film, which includes: selectively growing a film whose thickness is decreased by combustion on the underlying metal film using metal of the underlying metal film as a catalyst; and selectively growing a silicon oxide film on the underlying insulation film while combusting the film whose thickness is decreased by combustion.