The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 29, 2016

Filed:

Jul. 22, 2014
Applicant:

Samsung Electronics Co., Ltd., Suwon-Si, Gyeonggi-Do, KR;

Inventors:

Byung Joon Lee, Yongin-si, KR;

Masato Kajinami, Tokyo, JP;

Yoshiaki Yukimori, Kanagawa, JP;

Sang-Yoon Kim, Suwon-si, KR;

Hui-Jae Kim, Seoul, KR;

Byeong-Kuk Park, Asan-si, KR;

Seung Dae Seok, Yongin-si, KR;

Jae Bong Shin, Gunpo-si, KR;

Byeong Kap Choi, Seoul, KR;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/66 (2006.01); H01L 21/67 (2006.01); H01L 23/00 (2006.01); H05K 13/04 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67259 (2013.01); H01L 21/67109 (2013.01); H01L 21/67144 (2013.01); H01L 24/75 (2013.01); H01L 24/92 (2013.01); H05K 13/046 (2013.01); H01L 24/81 (2013.01); H01L 24/83 (2013.01); H01L 2224/73204 (2013.01); H01L 2224/7565 (2013.01); H01L 2224/7598 (2013.01); H01L 2224/75502 (2013.01); H01L 2224/75753 (2013.01); H01L 2224/75824 (2013.01); H01L 2224/81127 (2013.01); H01L 2224/81204 (2013.01); H01L 2224/81801 (2013.01); H01L 2224/8385 (2013.01); H01L 2224/83127 (2013.01); H01L 2224/83204 (2013.01); H01L 2224/92125 (2013.01);
Abstract

A semiconductor manufacturing apparatus may include: a pickup unit configured to pick up a chip in a first region of the semiconductor manufacturing apparatus; a bonding head configured to receive the picked-up chip and configured to move from the first region to a top of a circuit board in a second region of the semiconductor manufacturing apparatus; and/or an optical unit configured to detect a bonding position on the circuit board while moving from the first region to the second region. A semiconductor manufacturing apparatus may include: a bonding head including a heater for heating a chip and bonding the chip onto a circuit board; and/or a cooling block, adjacent to the heater, through which cooling liquid flows. The cooling liquid may be removed from the cooling block while the heater generates heat. The cooling liquid may be supplied to the cooling block while the heater is cooled.


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