The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 29, 2016
Filed:
Jun. 18, 2015
Applicant:
Powerchip Technology Corporation, Hsinchu, TW;
Inventors:
Yi-Shiang Chang, Changhua County, TW;
Chia-Chi Lin, Hsinchu County, TW;
Shin-Shing Yeh, Hsinchu, TW;
Pei-Shan Shih, Kaohsiung, TW;
Jun-Cheng Lai, Hsin-Chu, TW;
Assignee:
Powerchip Technology Corporation, Hsinchu, TW;
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
G06K 9/00 (2006.01); G06T 7/00 (2006.01); G06K 9/46 (2006.01); G06T 5/00 (2006.01);
U.S. Cl.
CPC ...
G06T 7/0004 (2013.01); G06K 9/4604 (2013.01); G06T 5/00 (2013.01); G06T 7/0042 (2013.01); G06T 7/0085 (2013.01); G06T 2207/30148 (2013.01);
Abstract
A method for detecting photolithographic hotspots is disclosed. After receiving layout data, an aerial image simulation is conducted to extract aerial image intensity indices. Based on the combination of one or more aerial image intensity indices, various aerial image detectors are generated. The value of aerial image detectors is verified to determine the position and type of the photolithographic hotspots.