The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 22, 2016
Filed:
Jan. 19, 2015
United Microelectronics Corp., Hsin-Chu, TW;
Shih-An Huang, New Taipei, TW;
Kun-Hsien Lee, Tainan, TW;
UNITED MICROELECTRONICS CORP., Hsin-Chu, TW;
Abstract
The present invention provides a method for forming a semiconductor structure, including: firstly, providing a substrate, a fin structure being disposed on the substrate, a gate structure crossing over the fin structure, and a first hard mask being disposed on the top surface of the gate structure. Next, a dielectric layer is formed, covering the substrate, the fin structure and the gate structure. Afterwards, a second hard mask is formed on the top surface of the first hard mask, where the width of the second hard mask is larger than the width of the first hard mask, a bottom surface of the second hard mask and a top surface of the first hard mask are on the same level. An etching process is then performed to remove parts of the dielectric and parts of the fin structure.