The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 22, 2016
Filed:
Nov. 26, 2014
Zhijie Wang, Tianjin, CN;
Zhigang Bai, Tianjin, CN;
Mei Liu, Tianjin, CN;
Jiyong Niu, Tianjin, CN;
Zhimei Sun, Tianjin, CN;
Huchang Zhang, Tianjin, CN;
Zhijie Wang, Tianjin, CN;
Zhigang Bai, Tianjin, CN;
Mei Liu, Tianjin, CN;
Jiyong Niu, Tianjin, CN;
Zhimei Sun, Tianjin, CN;
Huchang Zhang, Tianjin, CN;
FREESCALE SEMICONDUCTOR,INC., Austin, TX (US);
Abstract
A cleaning subsystem removes unwanted material, such as glaze, from saw blades used in a semiconductor singulation process. A cleaning module moves radially towards the saw blade and vertically with respect to the plane of the saw blade in order to enable abrasive cleaning blocks of the cleaning module to selectively remove material from either the upper and lower surfaces of the saw blade or the outer edge of the saw blade. The cleaning assembly can remove material from the saw blade at a predetermined time or position during the singulation process or upon detection of load imbalance during the rotation of the saw blade.