The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 15, 2016

Filed:

Jun. 29, 2015
Applicant:

Micron Technology, Inc., Boise, ID (US);

Inventors:

Brenda D Kraus, Boise, ID (US);

Eugene P. Marsh, Boise, ID (US);

Assignee:

Micron Technology, Inc., Boise, ID (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/285 (2006.01); H01L 21/336 (2006.01); H01L 29/788 (2006.01); H01L 29/423 (2006.01); B82Y 10/00 (2011.01); B82Y 30/00 (2011.01); H01L 21/28 (2006.01); H01L 29/792 (2006.01);
U.S. Cl.
CPC ...
H01L 29/42332 (2013.01); B82Y 10/00 (2013.01); B82Y 30/00 (2013.01); H01L 21/28273 (2013.01); H01L 21/28556 (2013.01); H01L 29/7881 (2013.01); Y10S 438/964 (2013.01); Y10S 977/943 (2013.01);
Abstract

Isolated conductive nanoparticles on a dielectric layer and methods of fabricating such isolated conductive nanoparticles provide charge storage units in electronic structures for use in a wide range of electronic devices and systems. The isolated conductive nanoparticles may be used as a floating gate in a flash memory. In an embodiment, conductive nanoparticles are deposited on a dielectric layer by a plasma-assisted deposition process such that each conductive nanoparticle is isolated from the other conductive nanoparticles to configure the conductive nanoparticles as charge storage elements.


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