The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 15, 2016
Filed:
Sep. 17, 2013
Asml Netherlands B.v., Veldhoven, NL;
Edwin Johan Buis, Belfeld, NL;
Gosse Charles De Vries, Veldhoven, NL;
Sven Antoin Johan Hol, Eindhoven, NL;
Erik Maria Rekkers, Boxtel, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
An EUV optical apparatus includes a number of adjustable mirrors () on mirror bodies (). Each mirror body is supported on an actuator () comprising a moving part () and a fixed casing part (). The actuator provides a resilient support () for the mirror body so that it is tiltable with two degrees relative to the casing. An electromagnetic motor (-) applies first part, under the influence of an applied motive force, the resilient mounting being arranged to provide a biasing force that resists said motive force. A magnetic coupling () is arranged between the moving and fixed parts so as to provide a counter-biasing force. The counter-biasing force partly opposes said biasing force and thereby reduces the motive force required to effect a given displacement. The actuator can thus be made with reduced size, weight and heat dissipation.