The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 08, 2016
Filed:
May. 29, 2012
Applicants:
Lan-hai Wang, Zhubei, TW;
Ding-i Liu, Hsin-Chu, TW;
Si-wen Liao, Hsin-Chu, TW;
Yong-hung Yang, Hsin-Chu, TW;
Jia-wei Hsu, Taichung, TW;
Inventors:
Lan-Hai Wang, Zhubei, TW;
Ding-I Liu, Hsin-Chu, TW;
Si-Wen Liao, Hsin-Chu, TW;
Yong-Hung Yang, Hsin-Chu, TW;
Jia-Wei Hsu, Taichung, TW;
Assignee:
Taiwan Semiconductor Manufacturing Company, Ltd., Hsin-Chu, TW;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/455 (2006.01); H01L 21/67 (2006.01); H01L 21/762 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67161 (2013.01); C23C 16/455 (2013.01); C23C 16/45587 (2013.01); C23C 16/45589 (2013.01); C23C 16/45591 (2013.01); H01L 21/6719 (2013.01); H01L 21/76224 (2013.01); Y10T 137/6416 (2015.04);
Abstract
A production tool includes a chamber, a heater in the chamber, and a pumping outlet on a side of the heater. A pumping liner is in the chamber and encircling the heater. The pumping liner and the heater have a first gap therebetween and a second gap therebetween. The second gap is different from the first gap, and the second gap is farther away from the first pumping outlet than the first gap.