The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 08, 2016
Filed:
Sep. 04, 2012
Applicants:
Yuzhuo LI, Mannheim, DE;
Ning Gao, Potsdam, NY (US);
Michael Lauter, Mannheim, DE;
Roland Lange, Limburgerhof, DE;
Inventors:
Assignee:
BASF SE, Ludwigshafen, DE;
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/302 (2006.01); H01L 21/461 (2006.01); C09G 1/02 (2006.01); C09K 13/00 (2006.01); C23F 1/00 (2006.01); C09G 1/00 (2006.01); H01L 21/3105 (2006.01); H01L 21/306 (2006.01);
U.S. Cl.
CPC ...
C09G 1/02 (2013.01); C09G 1/00 (2013.01); C09K 13/00 (2013.01); C23F 1/00 (2013.01); H01L 21/30625 (2013.01); H01L 21/31053 (2013.01);
Abstract
A chemical mechanical polishing (CMP) composition comprising (A) inorganic particles, organic particles, or a mixture or composite thereof, (B) a glycoside of the formulae 1 to 6 wherein Ris alkyl, aryl, or alkylaryl, Ris H, X1, X2, X3, X4, X5, X6, alkyl, aryl, or alkylaryl, Ris H, X1, X2, X3, X4, X5, X6, alkyl, aryl, or alkylaryl, Ris H, X1, X2, X3, X4, X5, X6, alkyl, aryl, or alkylaryl, Ris H, X1, X2, X3, X4, X5, X6, alkyl, aryl, or alkylaryl, and the total number of monosaccharide units (X1, X2, X3, X4, X5, or X6) in the glycoside is in the range of from 1 to 20, and (C) an aqueous medium.