The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 01, 2016
Filed:
Dec. 20, 2013
Senju Metal Industry Co., Ltd., Tokyo, JP;
Tsutomu Hiyama, Tokyo, JP;
Senju Metal Industry Co., Ltd., Tokyo, JP;
Abstract
In a gas-blowing-hole array structure, which enables gas to be blown to the whole surface of the conveyed member such as a printed circuit board, a semiconductor wafer or the like almost concentrically and allows the whole surface of conveyed member to be very uniformly heated or cooled, a nozzle pattern Pof blowing nozzlesis arranged to be line symmetry with a nozzle pattern Pof the blowing nozzlesin upper and lower divided sections of one side of the nozzle coverrelative to a center portion thereof that is orthogonal to a conveying direction, as shown in FIG.. In order for the arrangement patterns diagonally arranged in the nozzle coverto become identical, the nozzle pattern Pis arranged to be line symmetry with the nozzle pattern Pof the blowing nozzlesin upper and lower divided sections of the other side of the nozzle cover