The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 18, 2016
Filed:
Jun. 30, 2014
Taiwan Semiconductor Manufacturing Co., Ltd., Hsin-Chu, TW;
Wu-An Weng, Hsinchu, TW;
Chen-Chien Chang, Zhubei, TW;
Taiwan Semiconductor Manufacturing Co., Ltd., Hsin-Chu, TW;
Abstract
The present disclosure provides a deep trench capacitor device. A first capacitor electrode is made up of a doped region of semiconductor substrate in which two or more trenches are arranged. A second capacitor electrode is made up of a continuous body of conductive material. The continuous body of conductive material includes a lower body portion filling the two or more trenches and an upper body portion extending continuously over the lower body portion. The upper body portion extends upwardly out of the trenches by a non-zero distance. A capacitor dielectric liner is arranged in the two or more trenches to separate the first and second capacitor electrodes. The capacitor dielectric liner extends continuously out of the two or more trenches along outer sidewalls of the upper body portion.