The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9466668 B1

PDF
Full Text
Expired
Date of Patent:
Oct. 11, 2016

Filed:

Jan. 16, 2015
Applicant:

Taiwan Semiconductor Manufacturing Company, Ltd., Hsin-Chu, TW;

Inventors:

Jean-Pierre Colinge, Hsin-Chu, TW;

Gwan Sin Chang, Hsin-Chu, TW;

Carlos H. Diaz, Mountain View, CA (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 29/06 (2006.01); H01L 29/10 (2006.01); H01L 29/78 (2006.01);
U.S. Cl.
CPC ...
H01L 29/0676 (2013.01); H01L 29/1033 (2013.01); H01L 29/7827 (2013.01); H01L 29/7843 (2013.01);
Abstract

A device includes a semiconductor substrate and a vertical nano-wire over the semiconductor substrate. The vertical nano-wire includes a bottom source/drain region, a channel region over the bottom source/drain region, and a top source/drain region over the channel region. A top Inter-Layer Dielectric (ILD) encircles the top source/drain region. The device further includes a bottom ILD encircling the bottom source/drain region, a gate electrode encircling the channel region, and a strain-applying layer having vertical portions on opposite sides of, and contacting opposite sidewalls of, the top ILD, the bottom ILD, and the gate electrode.


Find Patent Forward Citations

Colinge, Jean-Pierre. (2016). Inducing localized strain in vertical nanowire transistors (U.S. Patent No. 9466668). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/9466668

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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