The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 04, 2016

Filed:

Feb. 05, 2014
Applicant:

Freiberger Compound Materials Gmbh, Freiberg, DE;

Inventors:

Ferdinand Scholz, Ulm, DE;

Peter Brückner, March-Hugstetten, DE;

Frank Habel, Freiberg, DE;

Gunnar Leibiger, Freiberg, DE;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/20 (2006.01); H01L 21/02 (2006.01); C30B 29/40 (2006.01); C30B 25/00 (2006.01); C30B 25/02 (2006.01); C30B 25/16 (2006.01);
U.S. Cl.
CPC ...
H01L 29/2003 (2013.01); C30B 25/00 (2013.01); C30B 25/02 (2013.01); C30B 25/165 (2013.01); C30B 29/403 (2013.01); C30B 29/406 (2013.01); H01L 21/0254 (2013.01);
Abstract

A process for producing a doped III-N bulk crystal, wherein III denotes at least one element of the main group III of the periodic system, selected from Al, Ga and In, wherein the doped crystalline III-N layer or the doped III-N bulk crystal is deposited on a substrate or template in a reactor, and wherein the feeding of at least one dopant into the reactor is carried out in admixture with at least one group III material. In this manner, III-N bulk crystals and III-N single crystal substrates separated therefrom can be obtained with a very homogeneous distribution of dopants in the growth direction as well as in the growth plane perpendicular thereto, a very homogeneous distribution of charge carriers and/or of the specific electric resistivity in the growth direction as well as in the growth plane perpendicular thereto, and a very good crystal quality.


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