The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 04, 2016
Filed:
Sep. 30, 2013
Applicant:
Strasbaugh, San Luis Obispo, CA (US);
Inventors:
Thomas E. Brake, San Luis Obispo, CA (US);
William J. Kalenian, San Luis Obispo, CA (US);
David L. Grant, Thousand Oaks, CA (US);
Assignee:
Strasbaugh, San Luis Obispo, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B24B 7/02 (2006.01); B24B 49/02 (2006.01); B24B 51/00 (2006.01); B24B 7/22 (2006.01);
U.S. Cl.
CPC ...
B24B 7/228 (2013.01); B24B 49/02 (2013.01);
Abstract
A method of grinding wafers includes determining thickness variations in a wafer; determining incremental adjustments to spindle alignment based on best fit predictions of wafer shaper; and implemented the incremental adjustments to spindle alignment of a grind module.