The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 27, 2016
Filed:
Jul. 06, 2012
Applicants:
Tadao Hashimoto, Santa Barbara, CA (US);
Sierra Hoff, Solvang, CA (US);
Inventors:
Tadao Hashimoto, Santa Barbara, CA (US);
Sierra Hoff, Solvang, CA (US);
Assignee:
SixPoint Materials, Inc., Buellton, CA (US);
Primary Examiner:
Int. Cl.
CPC ...
B23K 26/36 (2014.01); B23K 26/38 (2014.01); B23K 26/40 (2014.01);
U.S. Cl.
CPC ...
B23K 26/40 (2013.01);
Abstract
The present invention discloses a new tool to slice crystal ingots by using laser beams. Ingot crystals of III-nitride such as GaN are immersed in alkali solutions and irradiated with scanned lines of laser beams to slice wafers out of the ingots. The method is expected to achieve approximately one order of magnitude smaller slicing loss with minimized slicing damage.