The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 27, 2016
Filed:
Feb. 21, 2013
Tokyo Electron Limited, Tokyo, JP;
Hiroshi Komiya, Koshi, JP;
Kazuyoshi Eshima, Koshi, JP;
TOKYO ELECTRON LIMITED, Tokyo, JP;
Abstract
A liquid processing apparatusincludes a pure water supply source; a pure water flow rate control opening/closing valve; a sulfuric acid supply unit; a sulfuric acid supply opening/closing valve; mixing tanksandconfigured to mix pure water and sulfuric acid to produce a mixed chemical liquid and connected to a circulation linehaving a circulation pump; a liquid processing unitconfigured to perform a liquid process on a substrate W with the mixed chemical liquid. A controllercontrols a pure water supply opening/closing valve, the sulfuric acid supply opening/closing valve, and the circulation pump, such that operation of the circulation pumpis started after starting supply of the pure water to the mixing tanksand, and then, supply of sulfuric acid to the mixing tanksandis started.