The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 20, 2016

Filed:

Jun. 22, 2015
Applicant:

Intel Corporation, Santa Clara, CA (US);

Inventors:

Christopher R. Schroeder, Gilbert, AZ (US);

Christopher W. Ackerman, Phoenix, AZ (US);

James C. Shipley, Gilbert, AZ (US);

Tolga Acikalin, San Jose, CA (US);

Ioan Sauciuc, Phoenix, AZ (US);

Michael L. Rutigliano, Chandler, AZ (US);

James G. Maveety, Campbell, CA (US);

Ashish Gupta, Chandler, AZ (US);

Assignee:

INTEL CORPORATION, Santa Clara, CA (US);

Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01R 31/28 (2006.01); G01R 31/26 (2014.01); G06F 1/20 (2006.01); H01L 23/473 (2006.01); H01L 23/467 (2006.01); F28F 3/12 (2006.01);
U.S. Cl.
CPC ...
G01R 31/2875 (2013.01); G01R 31/2642 (2013.01); G06F 1/20 (2013.01); F28F 3/12 (2013.01); G06F 2200/201 (2013.01); H01L 23/467 (2013.01); H01L 23/473 (2013.01); H01L 2924/0002 (2013.01);
Abstract

An apparatus to test a semiconductive device includes a base plane that holds at least one heat-transfer fluid unit cell. The at least one heat-transfer fluid unit cell includes a fluid supply structure including a supply-orifice cross section as well as a fluid return structure including a return-orifice cross section. The supply-orifice cross section is greater than the return-orifice cross section. A die interface is also included to be a liquid-impermeable material.


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