The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 20, 2016

Filed:

Mar. 26, 2015
Applicant:

Jsr Corporation, Tokyo, JP;

Inventors:

Shin-ya Minegishi, Tokyo, JP;

Shin-ya Nakafuji, Tokyo, JP;

Satoru Murakami, Tokyo, JP;

Toru Kimura, Tokyo, JP;

Assignee:

JSR CORPORATION, Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/20 (2006.01); C09D 161/14 (2006.01); H01L 21/311 (2006.01); G03F 7/09 (2006.01); G03F 7/11 (2006.01); C08K 5/42 (2006.01); C08L 101/02 (2006.01);
U.S. Cl.
CPC ...
C09D 161/14 (2013.01); G03F 7/094 (2013.01); G03F 7/11 (2013.01); H01L 21/31144 (2013.01); C08K 5/42 (2013.01); C08L 101/02 (2013.01);
Abstract

A composition for forming a resist underlayer film includes (A) a compound. The compound (A) includes a group represented by formula (1). R represents a monovalent organic group having 1 to 30 carbon atoms. The monovalent organic group represented by R does not include an oxygen atom at an end of the side adjacent the sulfur atom. * represents a bonding hand. The compound (A) preferably includes a ring which is an aromatic ring, a heteroaromatic ring, or a combination thereof. The bonding hand denoted by * in the group represented by the formula (1) is preferably linked directly or via an oxygen atom to the ring.


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