The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 13, 2016
Filed:
Mar. 31, 2015
Applicant:
Micron Technology, Inc., Boise, ID (US);
Inventor:
Mark Kiehlbauch, Boise, ID (US);
Assignee:
Micron Technology, Inc., Boise, ID (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/32 (2006.01); H01L 21/768 (2006.01); H01L 21/3065 (2006.01); H01L 21/762 (2006.01); B81C 1/00 (2006.01); G02B 6/136 (2006.01); H01L 21/311 (2006.01); H01L 21/3213 (2006.01); B44C 1/22 (2006.01); H01L 21/308 (2006.01);
U.S. Cl.
CPC ...
H01L 21/76804 (2013.01); B44C 1/227 (2013.01); B81C 1/00103 (2013.01); B81C 1/00531 (2013.01); G02B 6/136 (2013.01); H01L 21/308 (2013.01); H01L 21/3065 (2013.01); H01L 21/3083 (2013.01); H01L 21/31116 (2013.01); H01L 21/32 (2013.01); H01L 21/32136 (2013.01); H01L 21/32137 (2013.01); H01L 21/76232 (2013.01); B81B 2203/033 (2013.01); B81B 2203/0315 (2013.01); B81B 2203/0323 (2013.01); B81B 2203/0338 (2013.01); B81B 2203/0353 (2013.01);
Abstract
A method of forming a substrate opening includes forming a plurality of side-by-side openings in a substrate. At least some of immediately adjacent side-by-side openings are formed in the substrate to different depths relative one another. Walls that are laterally between the side-by-side openings are removed to form a larger opening having a non-vertical sidewall surface where the walls were removed in at least one straight-line vertical cross-section that passes through the sidewall surface orthogonally to the removed walls.