The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 13, 2016

Filed:

Aug. 13, 2014
Applicant:

Ostendo Technologies, Inc., Carlsbad, CA (US);

Inventors:

Vitali Soukhoveev, Gaithersburg, MD (US);

Vladimir Ivantsov, Hyattsville, MD (US);

Benjamin A. Haskell, Carlsbad, CA (US);

Hussein S. El-Ghoroury, Carlsbad, CA (US);

Alexander Syrkin, Montgomery Village, MD (US);

Assignee:

Ostendo Technologies, Inc., Carlsbad, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/02 (2006.01); H01L 29/20 (2006.01); C30B 25/18 (2006.01); H01L 29/04 (2006.01); H01L 29/16 (2006.01); H01L 29/167 (2006.01); C30B 23/02 (2006.01); C30B 29/40 (2006.01);
U.S. Cl.
CPC ...
H01L 21/02381 (2013.01); C30B 23/025 (2013.01); C30B 25/18 (2013.01); C30B 29/406 (2013.01); H01L 21/02378 (2013.01); H01L 21/02389 (2013.01); H01L 21/02422 (2013.01); H01L 21/02433 (2013.01); H01L 29/045 (2013.01); H01L 29/167 (2013.01); H01L 29/1608 (2013.01); H01L 29/2003 (2013.01);
Abstract

A method has been developed to overcome deficiencies in the prior art in the properties and fabrication of semi-polar group III-nitride templates, films, and materials. A novel variant of hydride vapor phase epitaxy has been developed that provides for controlled growth of nanometer-scale periodic structures. The growth method has been utilized to grow multi-period stacks of alternating AlGaN layers of distinct compositions. The application of such periodic structures to semi-polar III-nitrides yielded superior structural and morphological properties of the material, including reduced threading dislocation density and surface roughness at the free surface of the as-grown material. Such enhancements enable to fabrication of superior quality semi-polar III-nitride electronic and optoelectronic devices, including but not limited to transistors, light emitting diodes, and laser diodes.


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