The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 06, 2016

Filed:

Nov. 05, 2014
Applicant:

International Business Machines Corporation, Armonk, NY (US);

Inventors:

Thomas N. Adam, Slingerlands, NY (US);

Kangguo Cheng, Schenectady, NY (US);

Bruce B. Doris, Slingerlands, NY (US);

Ali Khakifirooz, Los Altos, CA (US);

Alexander Reznicek, Troy, NY (US);

Assignee:

GLOBALFOUNDRIES INC., Grand Cayman, KY;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 29/08 (2006.01); H01L 27/12 (2006.01); H01L 29/06 (2006.01); H01L 21/8234 (2006.01); H01L 21/84 (2006.01);
U.S. Cl.
CPC ...
H01L 29/0847 (2013.01); H01L 21/823412 (2013.01); H01L 21/823418 (2013.01); H01L 21/823481 (2013.01); H01L 21/84 (2013.01); H01L 27/1203 (2013.01); H01L 29/0653 (2013.01);
Abstract

A semiconductor structure includes an active layer located on a substrate and a first and a second gate structure located on the active layer. A first raised epitaxial region is located on the active layer between the first and the second gate. The first raised epitaxial region has a first facet shaped edge and a first vertical shape edge, such that the first facet shaped edge is located adjacent the first gate structure. A second raised epitaxial region is also located on the active layer between the first and the second gate structure. The second raised epitaxial region has a second facet shaped edge and a second vertical shape edge, such that the second facet shaped edge is located adjacent the second gate structure. A trench region is located between the first and the second vertical shaped edge for electrically isolating the first and the second raised epitaxial region.


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