The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 06, 2016
Filed:
Feb. 28, 2012
Applicants:
Armin Schoeppach, Aalen, DE;
Hans-juergen Mann, Oberkochen, DE;
Frank Eisert, Aalen, DE;
Yim-bun Patrick Kwan, Aalen, DE;
Inventors:
Armin Schoeppach, Aalen, DE;
Hans-Juergen Mann, Oberkochen, DE;
Frank Eisert, Aalen, DE;
Yim-Bun Patrick Kwan, Aalen, DE;
Assignee:
Carl Zeiss SMT GmbH, Oberkochen, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03B 27/68 (2006.01); G03B 27/70 (2006.01); G03F 7/20 (2006.01); G02B 17/06 (2006.01);
U.S. Cl.
CPC ...
G03F 7/70825 (2013.01); G02B 17/0657 (2013.01);
Abstract
An optical arrangement includes at least one optical element and a support element for the optical element. The optical element and the support element are connected together by way of at least three decoupling elements. The decoupling elements are formed monolithically with the optical element and with the support element.