The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 06, 2016
Filed:
May. 06, 2013
Kla-tencor Corporation, Milpitas, CA (US);
Walter H. Johnson, Rocklin, CA (US);
Jianou Shi, Milpitas, CA (US);
Lansheng Dong, Shanghai, CN;
Haijing Peng, Shanghai, CN;
Xianghua Liu, Shanghai, CN;
Jiazhou Jin, Shanghai, CN;
Zhuoxian Zhang, Shanghai, CN;
Nanchang Zhu, Shanghai, CN;
KLA-Tencor Corporation, Milpitas, CA (US);
Abstract
A continuous variable spacing probe pin device, including first and second probe pins. The first and second probe pins are configured to measure a property of a conductive layer. In a first configuration, the first and second probe pins include respective first portions arranged to contact the conductive layer to measure the property. In a second configuration, the first and second probe pins include respective second portions arranged to contact the conductive layer to measure the property. A first area for each respective first portion is different from a second area for each respective second portion.