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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9425144 B1

PDFFull Text
Date of Patent:
Aug. 23, 2016

Filed:

Dec. 23, 2014

Metal fuse structure for improved programming capability

Applicant:

Globalfoundries Inc., Grand Cayman, KY (US);

Inventors:

Griselda Bonilla, Fishkill, NY (US);

Kaushik Chanda, Santa Clara, CA (US);

Samuel S. Choi, Beacon, NY (US);

Ronald G. Filippi, Wappingers Fall, NY (US);

Stephan Grunow, Poughkeepsie, NY (US);

Naftali Lustig, Croton on Hudon, NY (US);

Andrew H. Simon, Fishkill, NY (US);

Junjing Bao, San Diego, CA (US);

Assignee:

GlobalFoundries, Inc., Grand Cayman, KY;

Attorneys:

Hoffman Warnick LLC

Catherine Ivers

Primary Examiner:

Shaun Campbell

Int. Cl.
CPC ...
H01L 21/44 (2006.01); H01L 23/525 (2006.01); H01H 69/02 (2006.01); H01H 85/046 (2006.01); H01L 23/522 (2006.01); H01L 23/528 (2006.01); H01H 85/02 (2006.01);
U.S. Cl.
CPC ...
H01L 23/5256 (2013.01); H01H 69/02 (2013.01); H01H 85/046 (2013.01); H01L 23/528 (2013.01); H01L 23/5226 (2013.01); H01H 2085/0275 (2013.01); H01L 2924/0002 (2013.01); Y10T 29/49107 (2015.01);
Abstract

Structure providing more reliable fuse blow location, and method of making the same. A vertical metal fuse blow structure has, prior to fuse blow, an intentionally damaged portion of the fuse conductor. The damaged portion helps the fuse blow in a known location, thereby decreasing the resistance variability in post-blow circuits. At the same time, prior to fuse blow, the fuse structure is able to operate normally. The damaged portion of the fuse conductor is made by forming an opening in a cap layer above a portion of the fuse conductor, and etching the fuse conductor. Preferably, the opening is aligned such that the damaged portion is on the top corner of the fuse conductor. A cavity can be formed in the insulator adjacent to the damaged fuse conductor. The damaged fuse structure having a cavity can be easily incorporated in a process of making integrated circuits having air gaps.

Find Patent Forward Citations

Bonilla, Griselda. (2016). Metal fuse structure for improved programming capability (U.S. Patent No. 9425144). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/9425144

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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