The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 23, 2016
Filed:
Jan. 26, 2015
Applicant:
Carl Zeiss Smt Gmbh, Oberkochen, DE;
Inventors:
Guido Soyez, Ludwigsburg, DE;
Stephan Back, Langenau, DE;
Joachim Buechele, Westhausen, DE;
Julian Kaller, Koenigsbronn, DE;
Guido Limbach, Aalen, DE;
Harald Woelfle, Waldkirch, DE;
Assignee:
Carl Zeiss SMT GmbH, Oberkochen, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B 1/00 (2006.01); G03F 7/20 (2006.01); G02B 27/00 (2006.01);
U.S. Cl.
CPC ...
G03F 7/7015 (2013.01); G02B 27/0006 (2013.01); G03F 7/70825 (2013.01); G03F 7/70933 (2013.01);
Abstract
An optical system has a housing with a mount and an opening to a receiving region, the receiving region being located within the housing and including the mount. At least one optical element is inserted into and removed from the receiving region through the opening, and at least one gas supply device provides a flow of gas in the receiving region. An associated method of inserting or removing an optical element into or from a receiving region in a housing is also disclosed.