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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9416452 B1

PDFFull Text
Date of Patent:
Aug. 16, 2016

Filed:

Feb. 27, 2015

Vapor delivery device, methods of manufacture and methods of use thereof

Applicant:

Rohm and Haas Electronic Materials Llc, Marlborough, MA (US);

Inventors:

Egbert Woelk, North Andover, MA (US);

Ronald L. DiCarlo, Danville, NH (US);

Assignee:

ROHM AND HAAS ELECTRONIC MATERIALS LLC, Marlborough, MA (US);

Attorney:

Cantor Colburn LLP

Primary Examiner:

William McCalister

Int. Cl.
CPC ...
C23C 16/52 (2006.01); B01D 7/00 (2006.01); C23C 16/448 (2006.01); C23C 16/455 (2006.01); G05D 11/13 (2006.01); C30B 25/14 (2006.01); C30B 25/16 (2006.01);
U.S. Cl.
CPC ...
C23C 16/52 (2013.01); B01D 7/00 (2013.01); C23C 16/4481 (2013.01); C23C 16/45512 (2013.01); C23C 16/45557 (2013.01); C23C 16/45561 (2013.01); G05D 11/138 (2013.01); C30B 25/14 (2013.01); C30B 25/165 (2013.01); Y10T 137/0318 (2015.04); Y10T 137/2499 (2015.04); Y10T 137/2501 (2015.04); Y10T 137/2509 (2015.04); Y10T 137/2559 (2015.04); Y10T 137/2562 (2015.04); Y10T 137/265 (2015.04); Y10T 137/2657 (2015.04); Y10T 137/2663 (2015.04); Y10T 137/7761 (2015.04);
Abstract

A method comprises transporting a first stream of a carrier gas to a delivery device that contains a solid precursor compound. The first stream of carrier gas is at a temperature greater than or equal to 20° C. The method further comprises transporting a second stream of the carrier gas to a point downstream of the delivery device. The first stream and the second stream are combined to form a third stream, such that the dewpoint of the vapor of the solid precursor compound in the third stream is lower than the ambient temperature. The flow direction of the first stream, the flow direction of the second stream and the flow direction of the third stream are unidirectional and are not opposed to each other.

Find Patent Forward Citations

Woelk, Egbert. (2016). Vapor delivery device, methods of manufacture and methods of use thereof (U.S. Patent No. 9416452). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/9416452

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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