The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 16, 2016
Filed:
Apr. 06, 2015
Applicant:
Shinkawa Ltd., Tokyo, JP;
Inventor:
Toru Maeda, Tokyo, JP;
Assignee:
SHINKAWA LTD., Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B23K 31/02 (2006.01); B23K 3/08 (2006.01); H01L 23/00 (2006.01); B23K 20/00 (2006.01); B23K 20/26 (2006.01);
U.S. Cl.
CPC ...
B23K 3/082 (2013.01); B23K 20/007 (2013.01); B23K 20/26 (2013.01); H01L 24/78 (2013.01); H01L 24/85 (2013.01); H01L 24/45 (2013.01); H01L 2224/45139 (2013.01); H01L 2224/45144 (2013.01); H01L 2224/45147 (2013.01); H01L 2224/781 (2013.01); H01L 2224/78253 (2013.01); H01L 2224/78269 (2013.01); H01L 2224/78301 (2013.01); H01L 2224/85045 (2013.01); H01L 2224/85054 (2013.01); H01L 2224/85205 (2013.01); H01L 2924/181 (2013.01);
Abstract
An antioxidant gas blow-off unit comprises a plate-shaped hollow base portion with an antioxidant gas flow passage formed therein, a hole provided in the base portion so as to allow a capillary to be inserted thereinto or removed therefrom and configured to communicate with the antioxidant gas flow passage, and a plurality of electrodes embedded in a wall of the base portion in the vicinity of the hole and configured to generate plasma from an antioxidant gas. With the antioxidant gas blow-off unit, the bonding quality of a wire bonding apparatus can be improved.