The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 09, 2016
Filed:
Jan. 29, 2015
Applicant:
Micron Technology, Inc., Boise, ID (US);
Inventors:
Ahmed H. Abdelnaby, Boise, ID (US);
Sony Varghese, Boise, ID (US);
Assignee:
Micron Technology, Inc., Boise, ID (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/304 (2006.01); H01L 21/56 (2006.01); H01L 21/683 (2006.01); H01L 23/00 (2006.01); H01L 21/48 (2006.01);
U.S. Cl.
CPC ...
H01L 23/562 (2013.01); H01L 21/304 (2013.01); H01L 21/481 (2013.01); H01L 21/6835 (2013.01); H01L 21/568 (2013.01); H01L 2224/80 (2013.01);
Abstract
Apparatuses and methods for reducing the warp of semiconductor wafer stacks during manufacturing are disclosed. An engineered carrier wafer is disclosed. The engineered carrier wafer may be pre-stressed such that it exhibits a warp. The warp may be configured to counteract a warp of a device wafer included in the wafer stack. The overall warp of the wafer stack may be reduced.