The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 09, 2016
Filed:
Jan. 30, 2015
Tokyo Electron Limited, Tokyo, JP;
Yusuke Yoshida, Miyagi, JP;
Ryou Son, Miyagi, JP;
Takahiro Senda, Miyagi, JP;
Masayuki Kohno, Hopewell Junction, NY (US);
Naoki Matsumoto, Miyagi, JP;
TOKYO ELECTRON LIMITED, Tokyo, JP;
Abstract
A temperature measuring method for measuring a temperature of a member corresponding to a measuring object arranged within a chamber of a plasma processing apparatus is provided. The temperature measuring method involves obtaining a function (f) for correcting a correction target temperature (T) according to a measurement window temperature (T), the function (f) being computed based on the correction target temperature (T) corresponding to a temperature of the measuring object measured via a measurement window arranged at the chamber, a reference temperature (T) corresponding to a temperature of the measuring object measured without using the measurement window, and the measurement window temperature (T) corresponding to a temperature of the measurement window. The temperature measuring method further involves measuring the correction target temperature (T), measuring the measurement window temperature (T), and correcting the correction target temperature (T) according to the measurement window temperature (T) based on the obtained function (f).