The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 09, 2016
Filed:
Oct. 05, 2012
Silane composition and cured film thereof, and method for forming negative resist pattern using same
Applicant:
Central Glass Company, Limited, Ube-shi, Yamaguchi, JP;
Inventors:
Assignee:
Central Glass Company, Limited, Ube-shi, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/075 (2006.01); H01L 21/02 (2006.01); C09D 183/04 (2006.01); C09D 183/06 (2006.01); C09D 5/00 (2006.01); C08L 83/04 (2006.01); C08L 83/12 (2006.01); G03F 7/16 (2006.01); C08G 77/46 (2006.01); C08G 77/00 (2006.01);
U.S. Cl.
CPC ...
G03F 7/0757 (2013.01); C08L 83/04 (2013.01); C08L 83/12 (2013.01); C09D 5/00 (2013.01); C09D 183/04 (2013.01); C09D 183/06 (2013.01); G03F 7/168 (2013.01); H01L 21/02126 (2013.01); C08G 77/46 (2013.01); C08G 77/80 (2013.01);
Abstract
A composition provided to contain: