The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 19, 2016
Filed:
Jul. 09, 2015
Applicant:
Fei Company, Hillsboro, OR (US);
Inventors:
Maximus Theodorus Otten, Best, NL;
Abigaël Adriana Maria Kok, Eindhoven, NL;
Martin Verheijen, Geldrop, NL;
Assignee:
FEI COMPANY, Hillsboro, OR (US);
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01J 37/28 (2006.01); H01J 37/20 (2006.01); H01J 37/244 (2006.01);
U.S. Cl.
CPC ...
H01J 37/28 (2013.01); H01J 37/20 (2013.01); H01J 37/244 (2013.01); H01J 2237/28 (2013.01); H01J 2237/2802 (2013.01); H01J 2237/2817 (2013.01); H01J 2237/2826 (2013.01);
Abstract
A method of calibrating a Scanning Transmission Charged-Particle Microscope, operable in