The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 19, 2016
Filed:
May. 22, 2012
Costel Biloiu, Rockport, MA (US);
Craig R. Chaney, Lanesville, MA (US);
Neil J. Bassom, Hamilton, MA (US);
Benjamin Colombeau, Salem, MA (US);
Dennis P. Rodier, Francestown, NH (US);
Costel Biloiu, Rockport, MA (US);
Craig R. Chaney, Lanesville, MA (US);
Neil J. Bassom, Hamilton, MA (US);
Benjamin Colombeau, Salem, MA (US);
Dennis P. Rodier, Francestown, NH (US);
Varian Semiconductor Equipment Associates, Inc., Gloucester, MA (US);
Abstract
In one embodiment, a method for generating an ion beam having gallium ions includes providing at least a portion of a gallium compound target in a plasma chamber, the gallium compound target comprising gallium and at least one additional element. The method also includes initiating a plasma in the plasma chamber using at least one gaseous species and providing a source of gaseous etchant species to react with the gallium compound target to form a volatile gallium species.