The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 19, 2016
Filed:
Oct. 22, 2014
Applicant:
National Applied Research Laboratories, Taipei, TW;
Inventors:
Ming-Hsing Shen, Taipei, TW;
Wei-Chung Wang, Taipei, TW;
Chi-Hung Huang, Taipei, TW;
Jyh-Rou Sze, Taipei, TW;
Chun-Li Chang, Taipei, TW;
Assignee:
NATIONAL APPLIED RESEARCH LABORATORIES, Taipei, TW;
Primary Examiner:
Int. Cl.
CPC ...
G01B 9/02 (2006.01); G01J 3/45 (2006.01); G01J 3/447 (2006.01);
U.S. Cl.
CPC ...
G01B 9/02042 (2013.01); G01B 9/02044 (2013.01); G01J 3/447 (2013.01); G01J 3/45 (2013.01);
Abstract
The conventional white-light interferometer, confocal microscope, and ellipsometer are integrated as one device set in a functional sense, and the geometrical parameters conventionally measured may be deduced on the integrated device. Thus, the advantages and efficacies of equipment cost saving, on-line measuring, rapid monitoring, reduced manufacturing time, and reduced possibility of object damage during the manufacturing process may be secured, compared with the prior art.