The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 12, 2016
Filed:
Nov. 27, 2012
Asml Netherlands B.v., Veldhoven, NL;
Antonius Franciscus Johannes De Groot, Someren, NL;
Raymond Wilhelmus Louis Lafarre, Helmond, NL;
Yang-Shan Huang, Veldhoven, NL;
Sander Christiaan Broers, Weert, NL;
Peter Laurentius Maria Ros, Haaksbergen, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A movable stage system is configured to support an object. The stage system comprises an object table configured to support the object and an object table support defining an object table support surface configured to support the object table. The object table support comprises at least one first actuator to drive the object table support in a first driving direction substantially parallel to the object table support surface. In a projection on a plane parallel to the object table support surface the at least one actuator is spaced with respect to the object table in a direction perpendicular to the first driving direction such that the risk on slip between the object table support and the object table supported thereon is decreased.