The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 05, 2016
Filed:
Feb. 24, 2011
Mitsutoshi Ashida, Nirasaki, JP;
Mitsutoshi Ashida, Nirasaki, JP;
TOKYO ELECTRON LIMITED, Tokyo, JP;
Abstract
In an automatic matching unit, a controller includes a first and a second matching algorithm. The operating point Zis moved stepwise toward the matching point Zwith a relatively large pitch by using the first matching algorithm. Further, when the operating point Zis within the outer proximity range, the operating point Zis moved stepwise toward the matching point Zwith a relatively small pitch by using the second matching algorithm. In the second matching algorithm, the operating point Zis moved close to the third reference line TCor TCperpendicular to the first or second reference line Cor Calong, e.g., the route Z(7)→Z(8)→Z(9) on the impedance coordinates. The coordinates of the operating point Z(9) reaches an available quasi-matching point Zextremely close to the origin O (the matching point Z).