The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 05, 2016
Filed:
Dec. 05, 2014
Applicant:
International Business Machines Corporation, Armonk, NY (US);
Inventors:
Jeffrey P. Gambino, Westford, VT (US);
Eric D. Johnson, Westford, VT (US);
Ian A. McCallum-Cook, Burlington, VT (US);
Richard A. Phelps, Colchester, VT (US);
Anthony K. Stamper, Williston, VT (US);
Michael J. Zierak, Colchester, VT (US);
Assignee:
GLOBALFOUNDRIES INC., Grand Cayman, KY;
Primary Examiner:
Int. Cl.
CPC ...
H01L 23/58 (2006.01); H01L 31/04 (2014.01); G01R 31/26 (2014.01); H01L 29/06 (2006.01); H01L 29/10 (2006.01);
U.S. Cl.
CPC ...
G01R 31/2601 (2013.01); H01L 29/0626 (2013.01); H01L 29/0649 (2013.01); H01L 29/1083 (2013.01);
Abstract
A high resistivity substrate final resistance test structure, methods of manufacture and testing processes are disclosed. The test structure includes spaced apart implants extending into a high resistivity wafer in at least one kerf region of the wafer. The test structure further includes contacts in direct electrical contact to each of the spaced apart implants.