The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 05, 2016
Filed:
Jul. 21, 2014
American Air Liquide, Inc., Fremont, CA (US);
Glenn Kuchenbeiser, Newark, DE (US);
Venkateswara R. Pallem, Hockessin, DE (US);
American Air Liquide, Inc., Fremont, CA (US);
Abstract
Disclosed are sulfur containing organosilane precursors, methods of synthesizing the same, and methods of using the same to deposit silicon-containing films using vapor deposition processes for manufacturing semiconductors, photovoltaics, LCD-TFT, flat panel-type devices, refractory materials, or aeronautics. The disclosed precursors have the following formula: wherein Lis a sulfur atom and Lmay be chosen from a sulfur atom, an oxygen atom, or a nitrogen atom; Land Lare joined together via a carbon bridge having one to three carbon atoms; and L, Land the carbon bridge form a monoanionic ligand bonded to silicon.