The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 28, 2016

Filed:

Mar. 04, 2014
Applicant:

Qualcomm Incorporated, San Diego, CA (US);

Inventors:

Changhan Hobie Yun, San Diego, CA (US);

Chengjie Zuo, Santee, CA (US);

Jonghae Kim, San Diego, CA (US);

Mario Francisco Velez, San Diego, CA (US);

Daeik Daniel Kim, San Diego, CA (US);

Rick Allen Wilcox, San Diego, CA (US);

Assignee:

QUALCOMM INCORPORATED, San Diego, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H03H 9/13 (2006.01); H03H 9/15 (2006.01); H03H 9/54 (2006.01); H03H 9/02 (2006.01); H03H 9/46 (2006.01); H03H 3/02 (2006.01);
U.S. Cl.
CPC ...
H03H 9/02448 (2013.01); H03H 9/02133 (2013.01); H03H 9/02228 (2013.01); H03H 9/02244 (2013.01); H03H 9/132 (2013.01); H03H 9/133 (2013.01); H03H 9/15 (2013.01); H03H 9/462 (2013.01); H03H 3/02 (2013.01); H03H 9/54 (2013.01); H03H 2003/027 (2013.01);
Abstract

An integrated circuit device includes a piezoelectric substrate having a first surface and a second surface opposite the first surface. The device also includes a first electrode and a second electrode on the first surface of the piezoelectric substrate, the first electrode having a first width and the second electrode having a second width. The device further includes a third electrode and a fourth electrode on the second surface of the piezoelectric substrate, the third electrode having a third width that is substantially the same as the second width, and the fourth electrode having a fourth width that is substantially the same as the first width. The first and third electrodes operate as part of a first portion of a microelectromechanical systems (MEMS) resonator, and the second and fourth electrodes operate as part of a second portion of the MEMS resonator.


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