The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 28, 2016

Filed:

Oct. 27, 2015
Applicant:

Bondtech Co., Ltd., Kyoto, JP;

Inventor:

Akira Yamauchi, Kyoto, JP;

Assignee:

Bondtech Co., Ltd., Kyoto, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01B 11/14 (2006.01); H01L 23/00 (2006.01); H05K 3/30 (2006.01); H01L 23/544 (2006.01); H05K 1/02 (2006.01);
U.S. Cl.
CPC ...
H01L 24/75 (2013.01); G01B 11/14 (2013.01); H01L 24/81 (2013.01); H05K 3/303 (2013.01); H01L 23/544 (2013.01); H01L 24/83 (2013.01); H01L 2224/131 (2013.01); H01L 2224/13124 (2013.01); H01L 2224/13144 (2013.01); H01L 2224/13147 (2013.01); H01L 2224/16225 (2013.01); H01L 2224/75 (2013.01); H01L 2224/757 (2013.01); H01L 2224/75301 (2013.01); H01L 2224/81009 (2013.01); H01L 2224/8113 (2013.01); H01L 2224/81121 (2013.01); H01L 2224/81132 (2013.01); H01L 2224/81191 (2013.01); H01L 2224/81204 (2013.01); H01L 2224/81801 (2013.01); H01L 2224/83121 (2013.01); H01L 2924/0001 (2013.01); H01L 2924/014 (2013.01); H01L 2924/01004 (2013.01); H01L 2924/01005 (2013.01); H01L 2924/01006 (2013.01); H01L 2924/0107 (2013.01); H01L 2924/01013 (2013.01); H01L 2924/01029 (2013.01); H01L 2924/01033 (2013.01); H01L 2924/01075 (2013.01); H01L 2924/01079 (2013.01); H01L 2924/12042 (2013.01); H01L 2924/1461 (2013.01); H01L 2924/15788 (2013.01); H01L 2924/181 (2013.01); H05K 1/0269 (2013.01); H05K 2201/09918 (2013.01); H05K 2203/166 (2013.01); Y02P 70/613 (2015.11);
Abstract

A pressure application technique is provided that enables two objects to be pressurized (e.g., objects to be bonded) to be positioned with greater accuracy before having pressure applied thereto. The objects to be pressurized are moved relative to each other in a Z direction such that the objects are brought into contact with each other (step S). Then, a horizontal positional shift ΔD between the objects to be pressurized is measured in the contact state of the objects to be pressurized (step S). Thereafter, positioning of the objects to be pressurized is again performed by moving the objects to be pressurized relative to each other in the horizontal direction, as a result of which the positional shift ΔD is corrected (step S).


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