The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 28, 2016
Filed:
Oct. 02, 2015
Robert Kerprich, Portland, OR (US);
Karey Holland, North Plains, OR (US);
Diane Scott, Portland, OR (US);
Sudhanshu Misra, San Jose, CA (US);
Robert Kerprich, Portland, OR (US);
Karey Holland, North Plains, OR (US);
Diane Scott, Portland, OR (US);
Sudhanshu Misra, San Jose, CA (US);
NexPlanar Corporation, Hillsboro, OR (US);
Abstract
CMP pads having novel groove configurations are described. For example, described herein are CMP pads comprising primary grooves, secondary grooves, a groove pattern center, and an optional terminal groove. The CMP pads may be made from polyurethane or poly (urethane-urea), and the grooves produced therein may be made by a method from the group consisting of molding, laser writing, water jet cutting, 3-D printing, thermoforming, vacuum forming, micro-contact printing, hot stamping, and mixtures thereof.