The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 21, 2016
Filed:
May. 15, 2014
United Microelectronics Corp., Hsinchu, TW;
En-Chiuan Liou, Tainan, TW;
Yu-Ying Huang, Tainan, TW;
Jen-Hsiu Li, Tainan, TW;
Mei-Chen Chen, Tainan, TW;
Ya-Ling Chen, Kaohsiung, TW;
Yi-Jing Wang, Tainan, TW;
Chi-Ming Huang, Tainan, TW;
UNITED MICROELECTRONICS CORP., Hsinchu, TW;
Abstract
In this disclosure, a mark segmentation method and a method for manufacturing a semiconductor structure applying the same are provided. The mark segmentation method comprises the following steps. First, a plurality of segments having a width Wand separated from each other by a space Sformed on a substrate are identified by a processor. Thereafter, a plurality of marks are set over the segments by the processor. This step comprises: (1) adjusting a width Wof each one of the marks being equal to m(W+S)+Wor m(W+S)+Sby the processor, wherein m is an integer; and (2) adjusting a space Sof adjacent two of the marks by the processor such that WS=n(W+S), wherein n is an integer.